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Nano optics

Research direction

Micro-opto-electromechanical systems (MOEMS) and micro-nano optics, including: uncooled infrared detectors based on MEMS technology, micro-polarizer array sensors and focal plane polarization imaging technology research, micro-nano metasurface optics and its applications in sensing and imaging fields.

    Advances in semiconductor processing technology have provided a powerful means for creating MEMS microsensors with various functions, including temperature sensors, magnetic field sensors, pressure sensors, acceleration sensors, gas sensors, and image sensors. Among the many MEMS sensors, there is a special image sensor called an 'infrared detector' that can 'see' infrared rays, expanding the human visual range and allowing humans to 'see what they have never seen before.' Our research focuses on the design, preparation, performance, and application exploration of MEMS infrared detectors.

    In addition, since different materials show different spectral characteristic peaks (i.e. wavelengths) when absorbing and reflecting light, the reflection spectrum will carry polarization information determined by its own properties, such as roughness, water content, and the physical and chemical properties of the material. Therefore, driven by the need to improve target recognition and identification capabilities, we have further carried out research on infrared detectors that can provide multi-color detection and polarization detection functions, such as carbon nanotube-based micro-polarizer arrays, multi-color super-lenses based on metasurface optics, integrated optics of micro-polarizer arrays and super-lenses with infrared detectors, and corresponding imaging algorithms.


Representative research results